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• Acetaldehyde (Acetic aldehyde, ethanal, Ethyl aldehyde)
• C2H4O (CH3CHO)
• 75-07-0
• TWA: 25 ppm
• 4 %VOL
• 1.52
• Acetic Acid
• CH3COOH
• 64-19-7
• TWA: 10 ppm
• 4 %VOL
• 2.07
• Acetone (2-Propanone, dimethyl ketone, methyl ketone)
• C3H6O (CH3-CO-CH3)
• 67-64-1
• TWA: 500 ppm
• 2.5 %VOL
• 2.01
• Acetylene (Ethine, Ethyne)
• C2H2
• 74-86-2
• TWA:
• 2.5%VOL
• 0.9
• Acrylonitrile (Cyanoethylene, 2-Propenenitrile, Vinyl cyanide, AN, ACN)
• C3H3N (CH2=CH-CN)
• 107-13-1
• TWA: 2 ppm
• 3 %VOL
• 1.83
• Alpha-terpinene (1-Isopropyl-4-methyl-1,3-cyclohexadiene, a-Terpinene, α-terpinene)
• C10H16
• 99-86-5
• TWA: --
• 2.0%VOL
• 4.7
• Ammonia
• NH3
• 7664-41-7
• TWA: 25 ppm
• 15 %VOL
• 0.59
• Antimony Pentachloride (Antimony (V) chloride)
• SbCl5
• 7647-18-9
• TWA:
• 10.32
• Arsenic Pentafluoride
• AsF5
• 7784-36-3
• TWA: 3 ppm (OSHA, NIOSH), 0.01 mg(As)/m3
• --
• 5.87
• Arsenic Trifluoride
• AsF3
• 7784-35-2
• TWA: 0.01 mg/m3
• 4.55
• Arsine
• AsH3
• 7784-42-1
• TWA: 0.05 ppm
• 5.1 %VOL
• 2.69
• Benzene (Cyclohexatriene, benzol)
• C6H6
• 71-43-2
• TWA: 0.5 ppm
• 1.2 %VOL
• 2.7
• Boron Bromide (Tribromoborane, Boron tribromide)
• BBr3
• 10294-33-4
• TWA: 1 ppm
• 4 %VOL
• 8.65
• Boron trichloride (Boron chloride, Trichloroborane)
• BCl3
• 10294-34-5
• TWA:
• 4.05
• Boron Trifluoride (Trifluoroborane)
• BF3
• 7637-07-2
• TWA: 1 ppm
• 2.34
• Bromine
• Br2
• 7726-95-6
• TWA: 0.1 ppm
• 5.52
• Butadiene (1,3-butadiene, divinyl, vinylethylene)
• C4H6 (CH2=(CH)2=CH2)
• 106-99-0
• TWA: 2 ppm
• 2 %VOL
• 1.87
• Butane (n-Butane)
• C4H10
• 106-97-8
• TWA: 1000 ppm
• 1.9 %VOL
• 2.01
• Carbon Dioxide
• CO2
• 124-38-9
• TWA: 5000 ppm
• 1.52
• Carbon Monoxide
• CO
• 630-08-0
• TWA: 30 ppm
• 0.97
• Carbon tetrachloride (benzinoform, carbon tet, carbona, halon 1040, tetrasol)
• CCL4
• 56-23-5
• TWA: 5 ppm
• 5.31
• Chlorine
• CL2
• 7782-50-5
• TWA: 0.5 ppm
• 2.54
• Chlorine Dioxide
• CLO2
• 10049-04-4
• TWA: 0.1 ppm
• 2.33
• Chlorine Trifluoride
• CLF3
• 7790-91-2
• TWA: 0.1 ppm
• 3.19
• Chlorobenzene (Benzene chloride, chlorobenzol, Phenyl chloride)
• C6H5Cl
• 108-90-7
• TWA: 10 ppm
• 1.3 %VOL
• 3.89
• Chlorodifluoromethane (Monochlorodifluoromethane, R22 Freon, HCFC 22, Refron 22, R-22)
• CHClF2 (R22)
• 75-45-6
• TWA: 1000 ppm
• 2.99
• Chloroform
• CHCl3
• 67-66-3
• TWA: 10 ppm
• 4.12
• Chloropropene (allyl chloride, chloroallylene, alpha-chloropropylene)
• C3H5Cl
• 107-05-1
• TWA: 1 ppm
• 2.64
• Cupraselect (Cu TMVS)
• C10H13CuF6O2Si
• 139566-53-3 | 754-05-2 | 428-75-1
• TWA: 52 ppm
• 12.8
• Cyclohexane (Hexahydrobenzene, hexamethylene, hexanaphthene)
• C6H12
• 110-82-7
• TWA: 100 ppm
• 1.3 %VOL
• 2.91
• Diborane
• B2H6
• 19287-45-7
• TWA: 0.1 ppm
• 0.8 %VOL
• 0.96
• Dichloroethylene (1,2-Dichloroethene, Acetylene dichloride, DCE, symmetrical Dichloroethylene)
• C2H2Cl2 (ClCH=CHCl)
• 540-59-0
• TWA: 200 ppm
• 9.7 %VOL
• 3.35
• Dichlorosilane (Chlorosilane, Silicon chloride hydride, DCS)
• SiH2Cl2 (Cl2H2Si)
• 4109-96-0
• TWA: Not established
• Extremely flammable, Pyrophoric
• 3.49
• Dichlorotrifluoroethane (R123)
• CHCl2CF3
• 75-45-6
• TWA: 50 ppm
• 5.28
• Diethyl ether (Ethyl ether, ethyl oxide, ether)
• C4H10O ( (C2H5)2O)
• 60-29-7
• TWA: 400 ppm
• 1.9 %VOL
• 2.56
• Difluoroethane (Genetron 152a, R-152a)
• C2H4F2 (CH3CHF2, R-152a)
• 75-37-6
• TWA: 1000 ppm
• 3.7 %VOL
• 2.28
• Dimethyl ether
• CH3OCH3
• 60-29-7
• TWA: 400 ppm
• 2.0 %VOL
• 1.59
• Dimethylaluminum Hydride (Dimethylaluminumhydride)
• (CH3)2AlH
• 865-37-2
• TWA: --
• Highly Flammable
• 2.00
• Dimethylamine
• C2H7N ((CH3)2NH
• 124-40-3
• TWA: 5 ppm
• 2.8 %VOL
• 1.56
• Dimethylformamide (DMF, Formyldimethylamine, Formamide, n,n-Dimethylformamide)
• C3H7NO (HCON(CH3)2)
• 68-12-2
• TWA: 10 ppm
• 2.2 %VOL
• 2.52
• Disilane (Silicon hydride, Disilicon hexahydride, Disilicane, Silicoethane)
• Si2H6
• 1590-87-0
• TWA: --
• 2.2 %VOL
• 2.15
• Epichlorohydrin (gamma-Chloropropylene oxide, 2-(Chloromethyl)oxirane)
• C3H5ClO
• 106-89-8
• TWA: 0.5 ppm
• 3.8 %VOL
• 3.19
• Ethane
• C2H6
• 74-84-0
• TWA: 1000 ppm
• 3.0 %VOL
• 3.04
• Ethanol (Ethyl Alcohol)
• C2H6O (CH3CH2OH)
• 64-17-5
• TWA: 1000 ppm
• 3.3 %VOL
• 1.57
• Ethyl Benzene (Ethylbenzene, Ethylbenzol, phenylethane, EB)
• C8H10 (C6H5-C2H5)
• 100-41-4
• TWA: 100 ppm
• 0.8 %VOL
• 3.67
• Ethylamine
• C2H7N (C2H5NH2)
• 75-04-7
• TWA: 5 ppm
• 3.5 %VOL
• 1.56
• Ethylene
• C2H4 (CH2=CH2)
• 74-85-1
• TWA: 200 ppm
• 3.0 %VOL
• 0.97
• Ethylene Dichloride (Ethane dichloride, EDC)
• C2H4Cl2 (ClCH2CH2Cl, EDC)
• 107-06-2
• TWA: 10 ppm
• 6.2 %VOL
• 3.42
• Ethylene oxide (1,2-Epoxyethane, Oxirane, Dimethylene oxide, Eto)
• C2H4O
• 75-21-8
• TWA: 1 ppm
• 3 %VOL
• 1.52
• Ethylenediamine
• C2H8N2 (C2H4(NH2)2, H2NCH2CH2NH2)
• 107-15-3
• TWA: 10 ppm
• 2.5 %VOL
• 2.07
• Fluorine
• Formula:F2
• 7782-41-4
• TWA: 1 ppm
• 1.31
• Formaldehyde (HCHO)
• CH2O
• 50-00-0
• TWA: 1.0 ppm
• 7.0 %VOL
• 1.04
• Germane (Germanium hydride, germanium tetrahydride)
• GeH4
• 7782-65-2
• TWA: 0.2 ppm
• Extremely flammable, Pyrophoric
• 2.64
• Helium
• He
• 7440-59-7
• TWA: --
• 0.179
• Hexafluorobutadiene (Sifren 46, Hexafluoro-1,3-Butadiene)
• C4F6
• 685-63-2
• TWA: --
• 7.0 %VOL
• 5.59
• Hexafluoroethane (Freon 116, Hexafluoroethane, Perfluoroethane, R-116)
• C2F6
• 76-16-4
• TWA: --
• 4.76
• Hexafluoropropylene (R-1216, Hexafluoropropene)
• C3F6
• 116-15-4
• TWA: --
• 5.18
• Hydrazine
• N2H4
• 302-01-2
• TWA: 0.01 ppm
• 2.9 %VOL
• 1.11
• Hydrogen
• H2
• 1333-74-0
• TWA: --
• 4 %LEL
• 0.03
• Hydrogen Bromide (Hydrobromic acid)
• HBr
• 10035-10-6
• TWA: 2 ppm
• 2.79
• Hydrogen Chloride
• HCl
• 7647-01-0
• TWA: 2 ppm
• 1.26
• Hydrogen Cyanide
• HCN
• 74-90-8
• TWA: 3 ppm
• 5.6 %VOL
• 0.96
• Hydrogen Fluoride
• HF
• 7664-39-3
• TWA: 3 ppm
• --
• Hydrogen Peroxide
• H2O2
• 7722-84-1
• TWA: 1.0 ppm
• 1.2
• Hydrogen Selenide
• H2Se
• 7783-07-5
• TWA: 0.05 ppm
• 5.6 %VOL
• 2.8
• Hydrogen Sulphide
• H2S
• 7783-06-4
• TWA: 25 ppm
• 4.0 %VOL
• 1.18
• Iodine
• I2
• 7553-56-2
• TWA: 0.1 ppm
• 8.76
• Iso Propyl Alcohol (2-propanol, isopropanol, IPA, dimethyl carbinol)
• C3H8O (CH3CHOHCH3)
• 67-63-0
• TWA: 200 ppm
• 2.0 %VOL
• 2.07
• Methane
• CH4
• 540-59-0
• 2.5 %VOL
• 0.55
• Methyl alcohol (Methanol, carbinol, wood alcohol)
• CH4O (CH3OH)
• 67-56-1
• TWA: 200 ppm
• 6.0 %VOL
• 1.10
• Methyl Bromide (Bromomethane, Monobromomethane)
• CH3Br
• 74-83-9
• TWA: 1 ppm
• 10 %VOL
• 3.28
• Methyl Chloride
• CH3Cl
• 74-87-3
• TWA: 50 ppm
• 8.1 %VOL
• 1.74
• Methyl Iodide (Iodomethane)
• CH3I
• 74-88-4
• TWA: 2 ppm
• 4.90
• Methyl isobutyl ketone (4-Methyl-2-pentanone, Hexone, MIBK, Isopropylacetone)
• C6H12O ((CH3)2CHCH2COCH3)
• 108-10-1
• TWA: 50 ppm
• Flammable, LEL not specified
• 3.64
• Methylamine
• CH5N (CH3NH2)
• 74-89-5
• TWA: 5 ppm
• 4.9 %VOL
• 1.07
• Methylene Chloride (dichloromethane,HCC 30,methane dichloride,methylene bichloride,Freon 30)
• CH2CL2
• 75-09-2
• TWA: 50 ppm
• 13.0 %VOL
• 2.93
• Molybdenum Hexafluoride (Molybdenum (VI) Fluoride)
• MoF6
• 7783-77-9
• TWA: --
• 7.25
• Methyl Tert-Butyl Ether
• C5H12O
• 1634-04-4
• TWA: 50 ppm
• 1.6 %VOL
• 3.00
• Nitric Acid Vapour
• HNO3
• 7697-37-2
• TWA: 2 ppm
• 2.18
• Nitric Oxide
• NO
• 10102-43-9
• TWA: 25 ppm
• 1.03
• Nitrogen dioxide
• NO2
• 10102-44-0
• TWA: 3 ppm
• 1.12
• Nitrogen Trifluoride
• NF3
• 7783-54-2
• TWA: 10 ppm
• 2.45
• Nitrous Oxide (Dinitrogen monoxide, Hyponitrous acid anhydride, Laughing gas, Dinitrogen oxide)
• N2O
• 75-04-7
• TWA: 50 ppm
• 1.52
• Octane (n-Octane)
• C8H18
• 111-65-9
• TWA: 300 ppm
• 1.0 %VOL
• 3.94
• Oxygen
• O2
• 7782-44-7
• TWA: --
• 1.10
• Ozone
• O3
• 10028-15-6
• TWA: 0.5 ppm
• 1.66
• Perchloroethylene (tetrachloroethylene, ethylene tetrachloride)
• C2Cl4 (Cl2C=CCl2)
• 127-18-4
• TWA: 25 ppm
• 5.72
• Phosgene
• COCl2
• 75-44-5
• TWA: 0.5 ppm
• 3.29
• Phosphine
• PH3
• 7803-51-2
• TWA: 0.3 ppm
• 1.79 %VOL
• 1.17
• Phosphorus Oxichloride (Phosphoryl chloride, Trichlorophosphorus oxide, Trichlorophosphine oxide)
• POCL3
• 10025-87-3
• TWA: 0.1 ppm
• 5.29
• Phosphorus Pentafluoride
• PF5
• 7647-19-0
• TWA: 1 mg/m3
• 4.35
• Propylene Dichloride
• C3H6Cl2
• ‎78-87-5
• TWA: 75 ppm
• 3.4 %VOL
• 0.90
• Propylene oxide (1,2-Epoxypropane, Methyloxirane, Methyl ethylene oxide)
• C3H8O (CH3CHCH2O)
• 75-56-9
• TWA: 2 ppm
• 2.8 %VOL
• 2.00
• Pyridine (Azine, azabenzene)
• C5H5N
• 110-86-1
• TWA: 1 ppm
• 1.8 %VOL
• 1.73
• Silane (Silicon tetrahydride)
• SiH4
• 7803-62-5
• TWA: 5 ppm
• Extremely flammable, Pyrophoric
• 1.11
• Sulphur Dioxide
• SO2
• 7446-09-5
• TWA: 2 ppm
• 2.21
• Sulphur Hexafluoride
• SF6
• 2551-62-4
• TWA: 1000 ppm
• 5.04
• Sulfur Trioxide
• SO3
• 7446-11-9
• TWA: 2 ppm
• 2.76
• TDMAT (Tetrakis dimethylamido titanium)
• C8H24N4Ti
• 3275-24-9
• TWA: 5 ppm
• 7.74
• TEB (Ethyl Borate;Triethoxyborine;Boric Acid, Triethyl Ester)
• C6H15BO3 (B(C2H5O)3)
• 150-46-9
• TWA: --
• 5.04
• TEOS (Tetraethoxysilane, Tetraethyl Silicate, Ethyl Silicate)
• SiC8H20O4
• 78-10-4
• TWA: 10 ppm
• 7.19
• Tertiary-Butyl Arsine (TBA)
• C4H11As (C4H9AsH2)
• 4262-43-5
• TWA: --
• 2.4 %VOL
• 4.63
• Tin tetrachloride (Tin chloride, Stannic chloride)
• SnCl4
• 7646-78-8 10026-06-9 (pentahydrate)
• TWA: --
• 1.72
• TMB (Trimethyl boron,Trimethyl borane)
• B(CH3)3
• 593-90-8
• TWA: 7 ppm
• Flammable
• 0.48
• Toluene (Methylbenzene, toluol, phenylmethane)
• C7H8 (C6H5CH3)
• 108-88-3
• TWA: 50 ppm
• 1.1 %VOL
• 3.18
• Trichloroethylene (Ethinyl Trichloride)
• C2HCl3
• 79-01-6
• TWA: 100 ppm
• 1.13
• Triethylamine
• C6H15N
• 121-44-8
• TWA: 10 ppm
• 1.20 %VOL
• 0.56
• Trifluoromethane (Carbon trifluoride, fluoroform, R-23, Freon R23, Methyl trifluoride)
• CHF3
• 75-46-7
• TWA: 0.5%
• 2.43
• Trimethoxysilane
• C6H16O3Si
• 2487-90-3
• TWA: --
• Flammable, no data
• 0.74
• Trimethylamine
• (CH3)3N
• 75-50-3
• TWA: 15 ppm
• 2.0 %VOL
• 0.49
• Trimethylsilane (Trimethyl silane, 2-Methyl-2-silapropane, trimethylsilyl hydride)
• (CH3)3SiH
• 993-07-7
• TWA: 5 ppm
• Flammable, no data
• 0.49
• Vinyl Chloride
• C2H3Cl
• 75-01-4
• TWA: 1 ppm
• 3.6 %VOL
• 2.20
• Xylene - Mixed Isomers (Dimethyl Benzene, Xylol, Methyltoluene)
• C8H10
• 95-47-6
• TWA: 100 ppm
• 0.9-1.1 %VOL
• 3.7